Computer simulation of Ostwald ripening for ion beam synthesis of buried layers

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 178, Issue 1-4, 2001, Pages 135-137

  Pohl, T ^a   Hammerl, C ^a   Rauschenbach, B ^b   Rude U ^c  

^a Institut f?r Physik   (Germany)

^b UNIVERSITY OF LEIPZIG   (Germany)

^c UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Computer simulation; Diffusion; Ion beam synthesis; Ostwald ripening; Precipitates

Indexed keywords

ALGORITHMS; COALESCENCE; COMPUTER SIMULATION; ION BOMBARDMENT; ION IMPLANTATION; MATHEMATICAL MODELS; PRECIPITATION (CHEMICAL); SYNTHESIS (CHEMICAL);

ION BEAM SYNTHESIS; MULTIGRID ALGORITHMS; OSTWALD RIPENING THEORY;

SEMICONDUCTING FILMS;

EID: 0035334252     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)00511-0     Document Type: Conference Paper

References (9)