Microstructural evolution in the oxidized chromium nitride coatings prepared by unbalanced magnetron sputtering

Journal of the Electrochemical Society

Volumn 150, Issue 5, 2003, Pages

  Wang, C C ^a   Hsieh, W P ^a   Shiao, M H ^a   Lin, J H ^b   Shieu, F S ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM COMPOUNDS; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; MICROSTRUCTURE; MORPHOLOGY; OXIDATION; PHASE TRANSITIONS; SCANNING ELECTRON MICROSCOPY; STAINLESS STEEL; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

CHROMIUM NITRIDE THIN FILM; PHASE DECOMPOSITION; UNBALANCED MAGNETRON SPUTTERING;

PROTECTIVE COATINGS;

EID: 0037840593     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1563649     Document Type: Article

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