Emission characteristics of a radio-frequency powered helium glow-discharge plasma excitation source associated with bias current introduction

Bunseki Kagaku

Volumn 52, Issue 6, 2003, Pages 439-445

  Matsuta, Hideyuki ^a   Naeem, Tariq Mahmood ^a   Wagatsuma, Kazuaki ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Bias current introduction; Glow discharge optical emission spectrometry; Glow discharge plasma; Helium; Radiofrequency

Indexed keywords

ARGON; HELIUM;

ANALYTIC METHOD; ARTICLE; ATOM; ATOMIC EMISSION SPECTROMETRY; ELECTRIC CURRENT; ENERGY ABSORPTION; OPTICAL DENSITY; OPTICAL INSTRUMENTATION; RADIOFREQUENCY; SURFACE PLASMON RESONANCE;

EID: 0037820463     PISSN: 05251931     EISSN: None     Source Type: Journal    
DOI: 10.2116/bunsekikagaku.52.439     Document Type: Article

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