Advanced helium glow-discharge emission source by conducting d.c. self- bias current in the 13.56 MHz radio frequency plasma

Analytical Sciences

Volumn 15, Issue 4, 1999, Pages 319-320

  Matsuta, Hideyuki ^a   Wagatsuma, Kazuaki ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Atomic emission spectrometry; Glow discharge; Helium; Radio frequency

Indexed keywords

GLOW DISCHARGES; HELIUM;

ATOMIC EMISSION SPECTROMETRY; EMISSION SOURCES; RADIO FREQUENCIES; RADIO FREQUENCY PLASMA;

RADIO WAVES;

HELIUM;

ARTICLE; ATOMIC EMISSION SPECTROMETRY; ENERGY; GAS ANALYSIS; PHOTOGRAPHY; PLASMA; RADIOFREQUENCY; SPECTROMETRY;

EID: 0033383040     PISSN: 09106340     EISSN: None     Source Type: Journal    
DOI: 10.2116/analsci.15.319     Document Type: Article

References (2)

1. K. Wagatsuma, Tetsu To Hagane, 85, 34 (1999).
2. K. Wagatsuma and H. Matsuta, Spectrochim. Acta Part B