Piezoelectric ultrasonic micromotor with 1.5 mm diameter

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 50, Issue 4, 2003, Pages 361-367

  Dong, Shuxiang ^a,b   Lim, Siak P ^c   Lee, Kwork H ^c   Zhang, Jingdong ^a   Lim, Leong C ^c   Uchino, Kenji ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b State University   (United States)

^c NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; FINITE ELEMENT METHOD; LEAD COMPOUNDS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; STATORS; THIN FILMS; TORQUE; VIBRATIONS (MECHANICAL);

LEAD ZIRCONATE TITANATE; PIEZOELECTRIC STATOR; PIEZOELECTRIC ULTRASONIC MICROMOTOR;

ULTRASONIC DEVICES;

EID: 0037811737     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2003.1197958     Document Type: Article

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