Cylindrical micro ultrasonic motor fabricated by improved hydrothermal method

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 49-52

  Morita, Takeshi ^a   Kurosawa, Minoru ^a   Higuchi, Toshiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; STATORS; THIN FILMS; ULTRASONIC DEVICES;

HYDROTHERMAL METHODS; MICROULTRASONIC MOTORS;

MOTORS;

EID: 0030718303     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)