3D atomic imaging of SiGe system by X-ray fluorescence holography

Journal of Materials Science: Materials in Electronics

Volumn 14, Issue 5-7, 2003, Pages 459-462

  Hayashi, K ^a   Takahashi, Y ^a   Matsubara, E ^a   Nakajima, K ^a   Usami, N ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ATOMIC STRUCTURE; CRYSTAL LATTICES; EPITAXIAL GROWTH; FLUORESCENCE; IMAGE RECONSTRUCTION; SYNCHROTRON RADIATION; X RAY CRYSTALLOGRAPHY;

THREE-DIMENSIONAL ATOMIC IMAGING; X-RAY FLUORESCENCE HOLOGRAPHY;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0037811334     PISSN: 09574522     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1023993911437     Document Type: Article

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