Light elements quantitative x-ray microanalysis of thin samples in STEM. Absorption correction using EELS data

Journal of Physics D: Applied Physics

Volumn 36, Issue 13, 2003, Pages 1599-1604

  Banchet, V ^a   Michel, J ^a   Jallot, E ^b   Laurent Maquin, D ^a   Balossier, G ^a  

^a INSERM   (France)

^b CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DISSOLUTION; ELECTRON ENERGY LOSS SPECTROSCOPY; ENERGY DISPERSIVE SPECTROSCOPY; MICROANALYSIS; SCANNING ELECTRON MICROSCOPY; SILICA;

QUANTIFICATION RATIO METHODS;

THIN FILMS;

EID: 0037767558     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/36/13/326     Document Type: Article

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