Experimental and theoretical characterization of the surface acoustic wave propagation properties of GaN epitaxial layers on c-plane sapphire

Journal of Materials Research

Volumn 18, Issue 5, 2003, Pages 1157-1161

  Choi, Kook Hyun ^a   Kim, Hyeong Joon ^a   Chung, Su Jin ^a   Kim, Jin Yong ^b   Lee, Tae Kun ^c   Kim, Young Jin ^d  

^a Seoul National University   (South Korea)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c Seoul National University of Science and Technology   (South Korea)

^d Kyonggi University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE PROPAGATION; EPITAXIAL GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SAPPHIRE; THIN FILMS;

SURFACE ACOUSTIC WAVES (SAW);

GALLIUM NITRIDE;

EID: 0037662266     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2003.0158     Document Type: Article

References (17)

1. H. Nakahata, K. Higaki, A. Hachico, S. Shikata, N. Fujimori, Y. Takahashi, T. Kajihara, and Y. Yamamoto, Jpn. J. Appl. Phys. Pt. 1 33, 324 (1994).
2. G.D. O'Clock and M.T. Duffy, Appl. Phys. Lett. 23, 55 (1973).
3. I.S. Didenko, F.S. Hickernell, and N.F. Naumenko, IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 47, 179 (2000).
4. A. Polian, M. Grimditch, and I. Grzegory, J. Appl. Phys. 79, 3343 (1996).
5. R.B. Schwarz, K. Khachataryan, and R.E. Weber, Appl. Phys. Lett. 70, 1122 (1997).
6. C. Deger, E. Born, H. Angerer, O. Ambacher, M. Stutzmann, J. Hormstein, E. Riha, and G. Fischeruer, Appl. Phys. Lett. 72, 2400 (1998).
7. M. Yamaguchi, T. Yagi, T. Azuhata, T. Sato, K. Suzuki, S. Chichibu, and S. Nakamura, J. Appl. Phys. 86, 1860 (1999).
8. T. Deduchi, D. Ichiryu, K. Toshikawa, K. Sekiguchi, T. Sato, R. Matsuo, T. Azuhata, M. Yamaguchi, T. Yagi, S. Chichibu, and S. Nakamura, J. Appl. Phys. 86, 1860 (1999).
9. K. Kim, W.R.L. Lambrecht, and B. Segall, Phys. Rev. B 53, 16310 (1996); 53, 7018 (1997).
10. K. Kim, W.R.L. Lambrecht, and B. Segall, Phys. Rev. B 53, 16310 (1996); 53, 7018 (1997).
11. A.F. Wright, J. Appl. Phys. 82, 2833 (1997).
12. K. Shimada, T. Sato, and K. Suzuki, J. Appl. Phys. 84, 4951 (1998).
13. G.W. Farnell and E.L. Adler, in Physical Acoustics, edited by R.N. Thurston and W.P. Mason (Academic Press, New York, 1972), Vol. IX, pp. 35-127.
14. E.L. Adler, J.K. Slaboszewicz, G.W. Farnell, and C.K. Jen, IEEE Trans. Ultrason. Ferroelectr. and Freq. Contr. 37, 215 (1990).
15. I.L. Guy, S. Muensit, and E.M. Goldys, Appl. Phys. Lett. 75, 4133 (1999).
16. S. Muensit E.M. Goldys, and I.L. Guy, Appl. Phys. Lett. 75, 3965 (1999).
17. A.S. Barker, Jr. and M. Ilegems, Phys. Rev. B 7, 743 (1973).