Design criteria of buckling microbridges

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3511, Issue , 1998, Pages 288-296

  Fang, Weileun ^a   Hu, Hsinhwa ^a   Lee, Chun Hsien ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Buckling; Microbridge

Indexed keywords

ANISOTROPY; BENDING (DEFORMATION); BOUNDARY CONDITIONS; BUCKLING; ETCHING; MICROMACHINING; RESIDUAL STRESSES; SILICA; THIN FILMS;

BUCKLING DEFORMATIONS; MICROBRIDGES; MICROELECTRONIC DEVICES; MICROMECHANICAL STRUCTURES; SILICON SUBSTRATES;

MICROELECTRONIC PROCESSING;

EID: 0037660496     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.324313     Document Type: Conference Paper

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