Investigation of the nano-structural properties of amorphous silicon carbon alloys by IBA technique, optical spectroscopy and GISAXS

Vacuum

Volumn 71, Issue 1-2 SPEC., 2003, Pages 47-51

  Gracin, D ^a   Jaksic, M ^a   Dubcek, P ^a   Medunic, Z ^a  

^a RUDER BO KOVI INSTITUTE   (Croatia)

Author keywords

Amorphous silicon carbide; ERDA; FTIR; GISAXS; Nano structure; Raman; RBS

Indexed keywords

COMPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGENATION; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; SILICON CARBIDE; THIN FILMS; X RAY SCATTERING;

ELASTIC RECOIL DETECTION ANALYSIS (ERDA);

AMORPHOUS ALLOYS;

EID: 0037427436     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00712-1     Document Type: Conference Paper

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