Nanoscale fabrication using single-ion impacts

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4590, Issue , 2001, Pages 173-178

  Millar, Victoria ^a   Pakes, Chris I ^a   Cimmino, Alberto ^a   Brett, David ^a   Jamieson, David N ^a   Prawer, Steven D ^a   Yang, Changyi J ^a   Rout, Bibhu ^a   McKinnon, Rita P ^a   Dzurak, Andrew S ^a   Clark, Robert G ^a  

^a UNIVERSITY OF MELBOURNE   (Australia)

Author keywords

AFM; Carbon nanotube; Ion implantation; PMMA; Silicon quantum computer

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON NANOTUBES; ION BEAMS; ION IMPLANTATION; MICROELECTRONIC PROCESSING; THIN FILMS;

QUANTUM COMPUTERS;

NANOTECHNOLOGY;

EID: 0037583829     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.454601     Document Type: Conference Paper

References (16)

1. See "National technology roadmap for semiconductors", Semiconductor Industry Association, 1997.
2. A. Brand, A. Haranahalli, N. Hsieh, Y.C. Lin, G. Sery, N. Stenton, B.J. Woo, S. Ahmed, M. Bohr, S. Thompson and S. Yang, "Intel's 0.25 Micron, 2.0 Volts Logic Process Technology", Intel Technology Journal, Third Quarter, 1998.
3. B.E. Kane, "A silicon-based nuclear spin quantum computer", Nature 393, pp. 133-137, 1998.
4. D.N. Jamieson, S. Prawer, I. Andrienko, D. Brett and V. Millar, "A role for ion implantation in quantum computing", Nuclear Inst. Meth. Phys. Res. B, in press, 2001.
5. A. Tombrello, "Predicting latent track dimensions", Nuclear Inst. Meth. Phys. Res. B 94, pp. 424-428, 1994.
6. Y.E. Strrauser and M.G. Heaton, American Laboratory, May 1994.
7. M. Waiblinger, Ch. Sommerhalter, B. Pietzak, J. Krauser, B. Mertesacker, M.Ch. Lux-Steiner, S. Klaumunzer, A. Weidinger, C. Ronning, H. Hofsab, "Electrically conducting ion tracks in diamond-like carbon films for field emission", Appl. Phys. A 69, pp. 239-240, 1999.
8. R.M. Papaleo, L.S. Farenzena, M.A. de Araujo and R.P. Livi, "Surface tracks in polymers induced by MeV heavyion impacts", Nuclear Inst. Meth. Phys. Res. B 151, pp. 135-138, 1999.
9. V. Millar, I.V. Andrienko, A. Cimmino and S.D. Prawer, "The study of C60 as a thin film resist in the Kane solid state quantum computer," proceedings of IQC 01, Quantum Information and Computation, in print, 2001.
10. I.V. Andrienko, A. Cimmino, D.N. Jamieson and S.D. Prawer, "Demonstration of single ion impact on Si(001) surface using a self-assembled organic monolayer of 1,3,5,7-Cyclooctatetraene," proceedings of IQC 01, Quantum Information and Computation, in print, 2001.
11. H. Dai, J.H. Hafner, A.G. Rinzler, D.T. Colbert and R.E. Smalley, "Nanotubes as nanoprobes in scanning probe microscopy," Nature 384, pp. 147-150, 1996.
12. R.M.D. Stevens, N.A. Frederick, B.L. Smith, D.E. Morse, G.D. Stucky and P.K. Nahsma, "Carbon nanotubes as probes for atomic force microscopy," Nanotechnology 11, pp. 1-5, 2000.
13. J.H. Hafner, C.L. Cheung and C.M. Lieber, "Direct Growth of Single-Walled Carbon Nanotube Scanning Probe Microscopy Tips," J. Am. Chem. Soc. 121, pp. 9750-9751, 1999.
14. C.V. Nguyen, K.-J. Chao, R.M.D. Stevens, L. Delzeit, A. Cassell, J. Han and M. Meyyappan, "Carbon nanotube tip probes: stability and lateral resolution in scanning probe microscopy and application to surface science in semiconductors," Nanotechnology 12, pp. 363-367, 2001.
15. Contact www.piezomax.com.
16. G. Seebohm and H.G. Craighead, in "" Quantum Semiconductor Devices and Technologies, edited by T.P. Pearsall, Kluwer Academic Publishers, United States, pp112.