Structural and optical characterization of Zn1-xCdxO thin films deposited by dc reactive magnetron sputtering

Chinese Physics Letters

Volumn 20, Issue 6, 2003, Pages 942-943

  Ma, De Wei ^a   Ye, Zhi Zhen ^a   Huang, Jing Yun ^a   Zhao, Bing Hui ^a   Wan, Shou Ke ^b   Sun, Xue Hao ^b   Wang, Zhan Guo ^b  

^a ZHEJIANG UNIVERSITY   (China)

^b INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CADMIUM COMPOUNDS; CRYSTAL ORIENTATION; MAGNETRON SPUTTERING; PHOTOLUMINESCENCE SPECTROSCOPY; SAPPHIRE; SEMICONDUCTOR ALLOYS; THIN FILMS; X RAY DIFFRACTION; ZINC OXIDE; ZINC SULFIDE;

CUBIC CRYSTAL; DC REACTIVE MAGNETRON SPUTTERING; HEXAGONAL WURTZITE; PREFERRED ORIENTATIONS; SAPPHIRE SUBSTRATES; SILICON SUBSTRATES; SPUTTERING TECHNIQUES; STRUCTURAL AND OPTICAL CHARACTERIZATIONS; THIN-FILMS; X-RAY DIFFRACTION MEASUREMENTS;

II-VI SEMICONDUCTORS;

EID: 0037561579     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/20/6/347     Document Type: Article

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