Accurate and robust noise-based trigger algorithm for soft breakdown detection in ultrathin

IEEE Transactions on Device and Materials Reliability

Volumn 1, Issue 2, 2001, Pages 120-127

  Dielectrics, Gate ^a   Roussel, Philippe J ^a   Degraeve, Robin ^a   Van Bosch, Geert Den ^a   Kaczer, Ben ^a   Groeseneken, Guido ^a  

^a IMEC   (Belgium)

Author keywords

Automatic soft breakdown detection; Noise monitor; Ultrathin oxides

Indexed keywords

EID: 0037551215     PISSN: 15304388     EISSN: 15304388     Source Type: Journal    
DOI: 10.1109/7298.956706     Document Type: Article

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