On the re-oxidation of silicon(0 0 1) surfaces modified by self-assembled monolayers

Applied Surface Science

Volumn 212-213, Issue SPEC., 2003, Pages 649-653

  Narducci, Dario ^a   Pedemonte, Laura ^b   Bracco, Gianangelo ^b  

^a UNIVERSITY OF MILANO BICOCCA   (Italy)

^b UNIVERSITY OF GENOA   (Italy)

Author keywords

Etching; Self assembled monolayers; Silicon; Surface

Indexed keywords

ETCHING; INFRARED SPECTROSCOPY; MICROELECTRONICS; MOLECULAR ORIENTATION; OXIDATION; PASSIVATION; SELF ASSEMBLY;

NANOPATTERNING;

SILICON;

EID: 0037534330     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00140-5     Document Type: Conference Paper

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