ZnO films synthesized by solid-source chemical vapor deposition with c-axis parallel to substrate

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 24, Issue 1, 2003, Pages 1-5

  Lu, Jianguo ^a   Ye, Zhizhen ^a   Zhang, Yinzhu ^a   Huang, Jingyun ^a   Zhao, Binghui ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

c axis parallel to the substrate; Mixed orientation; SS CVD; ZnO films

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING ZINC COMPOUNDS; X RAY DIFFRACTION;

C AXIS PARALLEL TO THE SUBSTRATE; MIXED ORIENTATION; ZINC OXIDE THIN FILMS;

THIN FILMS;

EID: 0037501339     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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