Micromachined on-chip inductor performance analysis

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 165-168

  Zhu, X ^a   Groves, R ^b   Subbanna, S ^b   Jadus, D ^b   Mukherjee, T ^a   Fedder, G K ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRIC NETWORK SYNTHESIS; ELECTROMAGNETIC FIELD EFFECTS; ELECTRONIC EQUIPMENT MANUFACTURE; MICROMACHINING; PERFORMANCE; POLYIMIDES; SILICON COMPOUNDS; SILICON WAFERS;

ADD ON PROCESS MODULES; ELECTROMAGNETIC FIELD SIMULATOR; MICROMACHINED ON CHIP INDUCTOR; SPIRAL DESIGN; STRAIGHT LINE DESIGN;

ELECTRIC INDUCTORS;

EID: 0037480729     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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