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Volumn 207, Issue 1-4, 2003, Pages 139-143
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Mechanism about improvement of NiSi thermal stability for Ni/Pt/Si(1 1 1) bi-layered system
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Author keywords
NiSi; The solid solution; Thermal stability
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Indexed keywords
ACTIVATION ENERGY;
INTERFACIAL ENERGY;
NICKEL COMPOUNDS;
PLATINUM;
RAPID THERMAL ANNEALING;
SOLID SOLUTIONS;
THERMODYNAMIC STABILITY;
X RAY DIFFRACTION;
BI-LAYERED SYSTEMS;
THIN FILMS;
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EID: 0037470335
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(02)01327-2 Document Type: Article |
Times cited : (13)
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References (16)
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