SCOPUS 정보 검색 플랫폼

Volumn 207, Issue 1-4, 2003, Pages 1-5

Cu cluster adhesion enhancement on the modified Dow Cyclotene surface through low energy N 2 + beam irradiation at grazing angles

Author keywords

Adhesion; Copper clusters; Dow Cyclotene; Metallization; Nitrogen ion implantation; Nitrogen plasma treatment

Indexed keywords

ADHESION; ION IMPLANTATION; NITROGEN; POLYMERS; SURFACE TREATMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

NITROGEN PLASMA TREATMENT;

COPPER;

EID: 0037470334 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(02)01322-3 Document Type: Article

Times cited : (7)

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