Analysis of thin film growth using finite element method

Surface and Coatings Technology

Volumn 167, Issue 2-3, 2003, Pages 249-254

  Subramaniam, Anandh ^a   Ramakrishnan, N ^a  

^a REGIONAL RESEARCH LABORATORY CSIR   (India)

Author keywords

Critical thickness; Epitaxial thin films; Finite element method

Indexed keywords

FINITE ELEMENT METHOD; NUCLEATION; STRAIN;

ELASTIC STRAIN ENERGY;

THIN FILMS;

COATING; CRYSTALLIZATION; FINITE ELEMENT METHOD; STRESS;

EID: 0037461193     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00915-5     Document Type: Article

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