Rotational feedthrough using an ultrasonic motor and its performance in ultra high vacuum conditions

Vacuum

Volumn 70, Issue 1, 2003, Pages 53-57

  Morita, Takeshi ^a,d   Takahashi, Shunichi ^b   Asama, Hajime ^c   Niino, Toshiki ^b  

^a EPFL   (Switzerland)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^c INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^d TOHOKU UNIVERSITY   (Japan)

Author keywords

Actuator; Baking; Extreme condition; Mechatronics; Rotational feedthrough; Ultra high vacuum; Ultrasonic motor; Vacuum

Indexed keywords

ACTUATORS; MECHATRONICS; PIEZOELECTRIC MATERIALS; TORQUE; ULTRASONIC MACHINE TOOLS;

ULTRASONIC MOTORS;

VACUUM TECHNOLOGY;

EID: 0037458760     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00704-2     Document Type: Article

References (3)

1. Ueha S, Tomikawa Y, Kurosawa M, Nakamura K. Ultrasonic motors theory and applications. Oxford: Oxford Science Publications, 1993. p. 7.
2. Ishii T., Matsuo E., Nakamura K., Ueha S. Jpn J Appl Phys. 37:1998;2956-2959.
3. Morita T., Niino T., Asama H. Vacuum. 65:2002;85-90.