Rotational feedthrough using ultrasonic motor for high vacuum condition

Vacuum

Volumn 65, Issue 1, 2002, Pages 85-90

  Morita, Takeshi ^a,c   Niino, Toshiki ^b   Asama, Hajime ^a  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^c EPFL   (Switzerland)

Author keywords

Rotational feedthrough; Ultrasonic motor; Vacuum condition

Indexed keywords

ELECTRIC MOTORS; MECHATRONICS; PIEZOELECTRIC MATERIALS; VIBRATIONS (MECHANICAL);

ULTRASONIC MOTORS;

VACUUM TECHNOLOGY;

EID: 0037176760     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00411-0     Document Type: Article

References (4)