Characteristics of ultrasonic motors driven in a vacuum

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 5 SUPPL. B, 1998, Pages 2956-2959

  Ishii, Takaaki ^a   Matsuo, Eiichi ^a   Nakamura, Kentaro ^a   Ueha, Sadayuki ^a   Ohnishi, Kazumasa ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b ALPS ELECTRIC CO LTD   (Japan)

Author keywords

Al2O3; Carbon metal; CFRP; Friction; Friction material; Si3N4; SiC; Ultrasonic motor; Vacuum; Wear

Indexed keywords

ALUMINA; ATMOSPHERIC PRESSURE; CARBON FIBER REINFORCED PLASTICS; FRICTION; ROTORS; SILICON CARBIDE; SILICON NITRIDE; STATORS; TORQUE; ULTRASONICS; VACUUM APPLICATIONS; WEAR OF MATERIALS;

CARBON METAL; CONTACT SURFACES; FRICTION COEFFICIENT; FRICTION MATERIAL; ULTRASONIC MOTOR; VACUUM PRESSURE;

MOTORS;

EID: 0032064582     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.2956     Document Type: Article

References (5)

1. T. Ishii, E. Matsuo, K. Nakamura, S. Ueha and K. Ohnishi: Proc. World Congress on Ultrasonics, Yokohama (1997) p. 168.
2. K. Nakamura, M. Kurosawa and S. Ueha: IEEE Trans. Ultrason., Ferroelectr. & Freq. Control 40 (July 1993) July, 395.
3. Japanese Society of Tribologists: Shinzairyo no Tribology (Tribology of New Materials) (Yokendo Ltd., Tokyo, 1991) p. 105 [in Japanese].
4. K. Nakamura, M. Kurosawa, H. Kurebayashi and S. Ueha: IEEE Trans. Ultrason., Ferroelectr., & Freq. Control 38 (1991) September, 481.
5. T. Ishii, S. Ueha, K. Nakamura and K. Ohnishi: Jpn. J. Appl. Phys. 34 (1995) 2765.