Electron induced degradation of E-beam evaporated MgO layers

Surface Science

Volumn 528, Issue 1-3, 2003, Pages 97-102

  Caron, M ^a   Geittner, P ^a   Much, G ^a  

^a PHILIPS RESEARCH LABORATORIES   (Germany)

Author keywords

Electron bombardment; Insulating films; Magnesium oxides; Secondary electron emission

Indexed keywords

CONDUCTIVE FILMS; DEGRADATION; DIELECTRIC MATERIALS; ELECTRIC CONDUCTIVITY; ELECTRON BEAMS; ELECTRON IRRADIATION; INSULATING MATERIALS; MAGNESIA; X RAY PHOTOELECTRON SPECTROSCOPY;

MASS LOSS RATES;

THIN FILMS;

EID: 0037457399     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(02)02616-X     Document Type: Conference Paper

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