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Thin Solid Films

Volumn 397, Issue 1-2, 2001, Pages 170-175

Study of the secondary-electron emission from thermally grown SiO2 films on Si

(7) Yi, Whikun a Jeong, Taewon a Yu, Segi a Lee, Jeonghee a Jin, Sunghwan a Heo, Jungna a Kim, J M a

a Samsung Advanced Institute of Technology (SAIT) (South Korea)

Author keywords

Charging effect; Double humped shape; Secondary electron; Secondary electron emission (SEE)

Indexed keywords

ELECTRIC FIELD EFFECTS; ELECTRON TUNNELING; FILM GROWTH; HOLE MOBILITY; SECONDARY EMISSION; SILICA; SILICON WAFERS;

CHARGING EFFECTS;

SEMICONDUCTING FILMS;

EID: 0035499307 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01492-4 Document Type: Article

Times cited : (22)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.