Metastable-atom-stimulated desorption from hydrogen-passivated silicon surfaces

Surface Science

Volumn 528, Issue 1-3, 2003, Pages 91-96

  Yamauchi, Yasushi ^a   Ju, Xin ^a   Suzuki, Taku ^a   Kurahashi, Mitsunori ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Desorption induced by electronic transitions (DIET); Hydrides; Hydrogen atom; Metastable induced electron spectroscopy (MIES); Silicon

Indexed keywords

BAND STRUCTURE; ELECTRON TRANSITIONS; PASSIVATION; PHOTONS; POSITIVE IONS; SILICON; SPECTROSCOPY;

METASTABLE INDUCED ELECTRON SPECTROSCOPY (MIES);

DESORPTION;

EID: 0037457364     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(02)02615-8     Document Type: Conference Paper

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