Silicon carbide coating of mullite substrates by the CVD technique

Surface and Coatings Technology

Volumn 162, Issue 2-3, 2003, Pages 131-134

  Regiani, Inacio ^a   De Souza, Milton F ^a  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

Author keywords

Nucleation; Organometallic CVD; Silicon carbide

Indexed keywords

CHEMICAL VAPOR DEPOSITION; GRAPHITE; MICROHARDNESS; SILICON CARBIDE; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

CRYSTALLINITY;

COATINGS;

FILM;

EID: 0037454541     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00405-X     Document Type: Article

References (14)