The determination of nitrogen in Cr-N system by RBS and the weight gain technique

Thin Solid Films

Volumn 343-344, Issue 1-2, 1999, Pages 265-268

  Panjan, Peter ^a   Navinšek, Boris ^a   Zorko, Benjamin ^a   Zalar, Anton ^b  

^a JO EF STEFAN INSTITUTE   (Slovenia)

^b Institute of Surface Engineering and Optoelectronics Ljubljana   (Slovenia)

Author keywords

Hard coatings; Reactive sputter deposition; Rutherford backscattering spectrometry; Standard reference materials; Weight gain technique

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CHROMIUM COMPOUNDS; MULTILAYERS; NITRIDES; OXIDATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPUTTER DEPOSITION;

CHROMIUM NITRIDE; HARD COATINGS; STANDARD REFERENCE MATERIALS (SRM); WEIGHT GAIN TECHNIQUE;

COATINGS;

EID: 0344718503     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01570-3     Document Type: Article

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