Stable protocrystalline silicon and unstable microcrystalline silicon at the onset of a microcrystalline regime

Applied Physics Letters

Volumn 82, Issue 11, 2003, Pages 1718-1720

  Ahn, Jun Yong ^a   Jun, Kyung Hoon ^a   Lim, Koeng Su ^a   Konagai, Makoto ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; RAMAN SCATTERING; SEMICONDUCTING SILICON;

LIGHT INDUCED DEGRADATION;

POLYSILICON;

EID: 0037451387     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1561161     Document Type: Article

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