Optimization of preventive maintenance strategies in a multipurpose batch plant: Application to semiconductor manufacturing

Computers and Chemical Engineering

Volumn 27, Issue 4, 2003, Pages 449-467

  Anne Sylvie, Charles ^a   Floru, Ioana Ruxandra ^a   Azzaro Pantel, Catherine ^a   Pibouleau, Luc ^a   Domenech, Serge ^a  

^a UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

Maintenance; Optimization; Reliability; Replacement; Scheduling; Semiconductor manufacturing

Indexed keywords

COMPUTER SIMULATION; COSTS; OBJECT ORIENTED PROGRAMMING; PRODUCTION ENGINEERING; SEMICONDUCTOR DEVICE MANUFACTURE;

MAINTENANCE COSTS;

PREVENTIVE MAINTENANCE;

BATCH PROCESS; COST; MAINTENANCE; MANUFACTURING SYSTEM; SEMICONDUCTOR;

ARTICLE; COST; MATHEMATICAL MODEL; MEASUREMENT; SEMICONDUCTOR; SIMULATION; SIMULATOR;

EID: 0037445888     PISSN: 00981354     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0098-1354(02)00216-8     Document Type: Article

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