Using simulation to improve semiconductor manufacturing

Semiconductor International

Volumn 20, Issue 8, 1997, Pages 289-292

  Potti, Kishore ^a   Mason, Scott J ^a  

^a ADVANCED MICRO DEVICES   (United States)

Author keywords

Capacity maximization; Identification; Manufacturing constraint; Simulation models

Indexed keywords

COMPUTER SIMULATION; ETCHING; MAINTENANCE; MICROELECTRONIC PROCESSING; PROCESS ENGINEERING; SILICON WAFERS;

CAPACITY ANALYSIS; WORK IN PROCESS MANAGEMENT;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031186420     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (1)

1. J.W. Fowler and J.K. Robinson, "Measurement of Manufacturing Capacity (MIMAC) Project Final Report," SEMATECH Technology transfer #95062861A-TR, 1995.