Low polarization and low temperature reflow of inorganic borophosphosilicate glasses formed from organic sources

Materials Science and Engineering: B

Volumn 98, Issue 2, 2003, Pages 181-183

  Kobayashi, Keiji ^a  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Borophosphosilicate glasses; Dielectric planarizing; MOS capacitors

Indexed keywords

LOW TEMPERATURE EFFECTS; MOS CAPACITORS; POLARIZATION; SILICATES; ULSI CIRCUITS;

DIELECTRIC PLANARIZING;

BOROPHOSPHATE GLASS;

EID: 0037445184     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(02)00311-2     Document Type: Article

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