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Volumn 208, Issue Part_1_2, 1999, Pages 267-271
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Short Communication: “Low Dielectric Constants of B2O3—SiO2—Sí3N4 Glasses and their Electronic Molar Polarizability”
a
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Author keywords
[No Author keywords available]
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Indexed keywords
BORON COMPOUNDS;
DIELECTRIC DEVICES;
DIELECTRIC LOSSES;
GLASS;
LOW-K DIELECTRIC;
PERMITTIVITY;
POLARIZATION;
SILICA;
SILICON;
SILICON OXIDES;
ULSI CIRCUITS;
FLOW POINT;
GLASS SYSTEMS;
INSULATOR;
LOW DIELECTRIC CONSTANTS;
MULTILEVEL INTERCONNECTION;
POLARIZABILITIES;
NITROGEN COMPOUNDS;
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EID: 0344640901
PISSN: 09429352
EISSN: None
Source Type: Journal
DOI: 10.1524/zpch.1999.208.Part_1_2.267 Document Type: Article |
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Times cited : (3)
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References (16)
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