Deposition of fine carbon particles using pulsed ArF laser ablation assisted by inductively coupled plasma

Thin Solid Films

Volumn 374, Issue 2, 2000, Pages 287-290

  Suda, Y ^a   Nishimura, T ^a   Ono, T ^a   Akazawa, M ^a   Sakai, Y ^a   Homma, N ^b  

^a HOKKAIDO UNIVERSITY   (Japan)

^b Hokkaido Electric Power Co Inc   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COAGULATION; LASER ABLATION; PARTICLE SIZE ANALYSIS; PLASMA ETCHING; PULSED LASER APPLICATIONS; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

DIAMOND-LIKE CARBON (DLC) FILMS; INDUCTIVELY COUPLED PLASMAS (ICP);

AMORPHOUS FILMS;

EID: 0034291052     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01167-6     Document Type: Article

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