Mechanical considerations in the design of a micromechanical tuneable InP-based WDM filter

Journal of Microelectromechanical Systems

Volumn 8, Issue 3, 1999, Pages 328-334

  Greek, Staffan ^a   Gupta, Ram ^a   Hjort, Klas ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY RESONATORS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; OPTICAL RESONATORS; PHOTODETECTORS; SEMICONDUCTING INDIUM PHOSPHIDE; WAVELENGTH DIVISION MULTIPLEXING;

FABRY-PEROT RESONATORS; TUNEABLE FILTERS;

OPTICAL FILTERS;

EID: 0032594973     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.788637     Document Type: Article

References (11)

1. M. S. Unlu and S. Strite, "Resonant cavity enhanced photonic devices," J. Appl. Phys., vol. 78, no. 2, pp. 607-639, July 1995.
2. J. B. D. Soole et al., "High speed monolithic WDM detector for 1.5 mu fiber band," Electron. Lett., vol. 31, no. 15, pp. 1276-1277, July 1995.
3. C. Seassal et al., "InP-based micro-mechanical tunable and selective photodetector for WDM systems," in Proc. Minatured Systems Micro-Optics Micromechanics II, vol. 3008. SPIE, Feb. 1997, pp. 62-67.
4. N. Chitica, K. Streubel, and J. Andre, "Tunable monolithic Fabry-Perot filter manufactured by selective etching of InGaAs/InP epitaxial films," in Proc. Indium Phosphide Related Materials. Piscataway, NJ: IEEE, May 1997, pp. 115-117.
5. G. S. Li, W. Yuen, and C. J. Chang-Hasnain, "Wide and continuously tunable (30 nm) detector with uniform characteristics over tuning range," Electron. Lett., vol. 33, no. 13. pp. 1122-1124, June 1997.
6. F. Sugihwo, M. C. Larson, and J. S. Harris, "Micromachined widely tunable vertical cavity laser diodes." J. Microelectromech. Syst., vol. 7, no. 1, pp. 48-55, Mar. 1988.
7. A. Spisser et al., "Highly selective 1.55 μm InP/air gap micromachined Fabry-Perot filter for optical communications," Electron. Lett., vol. 34, no. 5, pp. 453-455, Mar. 1998.
8. J. Peerlings et al., "InGaAs/InP Fabry-Perot PIN reciever for dense wavelength division multiplex systems," in Dig. Technology Papers ECOC'98, Madrid, Spain, Sept. 20-24, 1998.
9. K. Hjort et al., "Demands and solutions for an indium phosphide based micromechanically tunable WDM photodetectors," in Dig. Technology Papers IEEE/LEOS IEES/SAMS Int. Conf. Optical MEMS Applications MOEMS'97, Nara, Japan, Nov. 18-21, 1997, pp. 39-44.
10. R. K. Wangsness, Electromagnetic Fields. New York: Wiley, 1986, pp. 103-108.
11. W. T. Thomson, Theory of Vibration with Applications, 3rd ed. London, U.K.: Unwin Hayman.