Thin plasma-polymerized layers of hexamethyldisiloxane for acoustoelectronic humidity sensors

Sensors and Actuators, B: Chemical

Volumn 44, Issue 1-3, 1997, Pages 275-278

  Radeva, Ekaterina ^a  

^a INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

Author keywords

Acousticoelectronic; Plasma polymerized; Resonator sensors

Indexed keywords

ACOUSTOELECTRIC EFFECTS; ATMOSPHERIC HUMIDITY; CRYSTAL RESONATORS; CURRENT DENSITY; GLOW DISCHARGES; PLASMA APPLICATIONS; POLYMERIZATION; PROTECTIVE COATINGS; SCANNING ELECTRON MICROSCOPY; SORPTION; THIN FILMS;

ACOUSTOELECTRONIC HUMIDITY SENSORS; HEXAMETHYLDISILOXANE; PLASMA POLYMERIZED FILMS; RESONATOR SENSORS;

CHEMICAL SENSORS;

EID: 0031248215     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)00229-3     Document Type: Article

References (10)

1. H. Yasuda, Plasma polymerization for protective coatings and composite membranes, J. Membr. Sci. 18 (1984) 273-284.
2. E. Sacher, J.E. Klemberg-Sapieha, H.P. Schreiber, M.R. Wertheimer, Moisture barrier properties of plasma-polymerized hexamethyldisiloxane, J. Appl. Polym. Sci. 38 (1984) 163-171.
3. M.R. Wertheimer, J.E. Klemberg-Sapieha, H.P. Schreiber, Advanced in basic and applied aspects of microwave plasma polymerization, Thin Solid Films 115 (1984) 109-124.
4. I. Sugimoto, M. Nakamura, H. Kuwano, Molecular sensing using plasma polymer thin-film probes, Sensors and Actuators B 10 (1993) 117-122.
5. M. Nakamura, I. Sugimoto, H. Kuwano, R. Lemos, Chemical sensing by analysing dynamics of plasma polymer film-coated sensors, Sensors and Actuators B 20 (1994) 231-237.
6. Jay W. Grate, M. Klusty, R. Andrew McGill, M. Abraham, G. Whiting, J. Andomian-Haftvan, The predominant role of swelling-induced modules changes of the sorbent phase in determining the responses of polymer-coated surface acoustic wave vapor sensors, Anal. Chem. 64 (6) (1992) 21-25.
7. C. Hamman, G. Kampfrath, Glow discharge polymeric films: preparation, structure, properties and applications, Vacuum 34 (12) (1984) 1053-1059.
8. E. Radeva, K. Bobev, L. Spassov, Study and application of glow discharge polymer layers as humidity sensors, Sensors and Actuators B 8 (1992) 21-25.
9. V.V. Malov, Piezoresonancnie Datchiki, Energoatomizdat M., 1989, p. 68 (in Russian).
10. E. Radeva, D. Tsankov, K. Bobev, L. Spassov, Fourier transform infrared analysis of hexamethyldisiloxane layers obtained in low-frequency glow discharge, J. Appl. Polym. Sci. 50 (1993) 165-171.