Photocurrent method for characterizing the interface of hydrophobically bonded Si wafers

Applied Physics Letters

Volumn 82, Issue 6, 2003, Pages 916-918

  Yu, L S ^a   Mages, P ^a   Qiao, D ^a   Jia, L ^a   Yu, P K L ^a   Lau, S S ^a   Suni, T ^b   Henttinen, K ^b   Suni, I ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

BAND STRUCTURE; BONDING; INTERFACES (MATERIALS); NITROGEN; PHOTOCURRENTS;

HYDROPHOBIC BONDING;

SILICON WAFERS;

EID: 0037428750     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1544063     Document Type: Article

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