Residual stress estimation of ceramic thin films by X-ray diffraction and indentation techniques

Scripta Materialia

Volumn 48, Issue 9, 2003, Pages 1331-1336

  Atar, Erdem ^a   Sarioglu, Cevat ^b   Demirler, Ugur ^c   Sabri Kayali, E ^c   Cimenoglu, Huseyin ^c  

^a GEBZE TECHNICAL UNIVERSITY   (Turkey)

^b MARMARA UNIVERSITY   (Turkey)

^c ISTANBUL TECHNICAL UNIVERSITY   (Turkey)

Author keywords

Microindentation; Residual stresses; Thin films; X ray diffraction

Indexed keywords

INDENTATION; MICROHARDNESS; RESIDUAL STRESSES; ROUGHNESS MEASUREMENT; THICKNESS MEASUREMENT; THIN FILMS; X RAY DIFFRACTION;

MICROINDENDATION;

CERAMIC MATERIALS;

EID: 0037408598     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-6462(03)00019-8     Document Type: Article

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