Synthesis and characterization of volatile metal β-diketonate chelates of M(DPM)n (M = Ce, Gd, Y, Zr, n = 3,4) used as precursors for MOCVD

Journal of Crystal Growth

Volumn 250, Issue 3-4, 2003, Pages 423-430

  Song, Haizheng ^a   Jiang, Yinzhu ^a   Xia, Changrong ^a   Meng, Guangyao ^a   Peng, Dingkun ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

A3. Metalorganic chemical vapor deposition; A3. Thin films; B1. diketonate chelates

Indexed keywords

DIFFERENTIAL THERMAL ANALYSIS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; RARE EARTH COMPOUNDS; RECRYSTALLIZATION (METALLURGY); SYNTHESIS (CHEMICAL); THERMOGRAVIMETRIC ANALYSIS; THIN FILMS; X RAY DIFFRACTION;

VOLATILE METALS;

CRYSTAL GROWTH;

EID: 0037399989     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(02)02413-2     Document Type: Conference Paper

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