Comparison study on sol-gel Pb(Zr0.3Ti0.7)O3 and Pb(Zr0.3Ti0.7)O3/PbTiO3 multilayer thin films for pyroelectric infrared detectors

Microelectronic Engineering

Volumn 66, Issue 1-4, 2003, Pages 738-744

  Sun, L L ^a   Tan, O K ^a   Liu, W G ^a   Chen, X F ^a   Zhu, W ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Multilayer thin film; Pyroelectric; PZT; Sol gel

Indexed keywords

DIELECTRIC LOSSES; FERROELECTRICITY; INFRARED DETECTORS; METALLOGRAPHIC MICROSTRUCTURE; MULTILAYERS; PERMITTIVITY; PYROELECTRICITY; SOL-GELS;

FIGURE OF MERIT (FOM);

THIN FILMS;

EID: 0037395041     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00993-0     Document Type: Conference Paper

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