Fabrication and characterization of anodic aluminum oxide template

Microelectronic Engineering

Volumn 66, Issue 1-4, 2003, Pages 166-170

  Wang, Xin ^a   Han, Gao Rong ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

AAO template; AFM; Pore widening time

Indexed keywords

ANODIC OXIDATION; ATOMIC FORCE MICROSCOPY; CHARACTERIZATION; ELECTRIC FIELD EFFECTS; ELECTRIC POTENTIAL; IONS; PHOSPHORIC ACID; PORE SIZE; THERMAL EFFECTS; X RAY DIFFRACTION;

PORE WIDENING;

ALUMINA;

EID: 0037393459     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00042-X     Document Type: Conference Paper

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