Microstructure evolution of hydrogen-implanted silicon during the annealing process

Microelectronic Engineering

Volumn 66, Issue 1-4, 2003, Pages 314-319

  Wang, Jing ^a   Xiao, Qinghua ^a   Tu, Hailing ^a   Shao, Beiling ^a   Liu, Ansheng ^a  

^a GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS   (China)

Author keywords

HREM; Hydrogen; Microstructure; Smart cut; SOI

Indexed keywords

ANNEALING; HIGH RESOLUTION ELECTRON MICROSCOPY; HYDROGEN; ION IMPLANTATION; MICROCRACKS; MICROSTRUCTURE; SILICON WAFERS; TRANSMISSION ELECTRON MICROSCOPY;

AMORPHOUS CLUMPS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0037391770     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00924-3     Document Type: Conference Paper

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