Characteristics of practical control for point-to-point (PTP) positioning systems - Effect of design parameters and actuator saturation on positioning performance

Precision Engineering

Volumn 27, Issue 2, 2003, Pages 157-169

  Wahyudi, ^a   Sato, Kaiji ^a   Shimokohbe, Akira ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Accuracy; Controller; Point to point; Positioning system; Robustness; Saturation

Indexed keywords

FRICTION; ROBUSTNESS (CONTROL SYSTEMS); SEMICONDUCTOR DEVICE MANUFACTURE; TRACKING (POSITION);

POINT-TO-POINT (PTP) POSITIONING SYSTEMS;

CONTROL EQUIPMENT;

EID: 0037377534     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(02)00226-X     Document Type: Article

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