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Volumn 16, Issue 3-4, 2003, Pages 591-595
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New insights on amorphous silicon-nitride microcavities
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Author keywords
Amorphous Silicon based alloys; Multilayers; Optical properties; Photoluminescence
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Indexed keywords
ANISOTROPY;
DENSITY (OPTICAL);
MULTILAYERS;
OPTICAL RESONATORS;
PHOTOLUMINESCENCE;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SILICON NITRIDE;
MICROCAVITIES;
AMORPHOUS SILICON;
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EID: 0037372196
PISSN: 13869477
EISSN: None
Source Type: Journal
DOI: 10.1016/S1386-9477(02)00651-3 Document Type: Conference Paper |
Times cited : (7)
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References (7)
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