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Volumn 57, Issue 11, 2003, Pages 1662-1669
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A study on nano-nucleation and interface of diamond film prepared by hot filament assisted with radio frequency plasma
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Author keywords
Diamond film; Interlayer; Nucleation
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
NUCLEATION;
PLASMA DEVICES;
RAMAN SCATTERING;
X RAY DIFFRACTION ANALYSIS;
RADIO FREQUENCY PLASMAS;
DIAMOND FILMS;
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EID: 0037369076
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0167-577X(02)01048-0 Document Type: Article |
Times cited : (8)
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References (16)
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