Diamond synthesis by using very high frequency plasmas in parallel plate electrodes configuration

Applied Physics Letters

Volumn 71, Issue 18, 1997, Pages 2707-2709

  Matsumoto, Seiichiro ^a   Asakura, Yoshiki ^b,c   Hirakuri, Kenji ^b  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b TOKYO DENKI UNIVERSITY   (Japan)

^c Nihon Inter Co   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0013323530     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120184     Document Type: Article

References (15)

1. S. Matsumoto, Y. Sato, M. Tsutsumi, and N. Setaka, J. Mater. Sci. 17, 3106 (1982).
2. M. Kamo, Y. Sato, S. Matsumoto, and N. Setaka, J. Cryst. Growth 62, 642 (1983).
3. S. Matsumoto, M. Hino, and T. Kobayashi, Appl. Phys. Lett. 51, 737 (1987).
4. K. Suzuki, A. Sawabe, H. Yasuda, and T. Inuzuka, Appl. Phys. Lett. 50, 728 (1987).
5. Y. Horose, Proc. 1st Int. Conf. Sci. Technol. New Dia., Oct. 1988, Tokyo (KTK, Tokyo, 1990), p. 51.
6. P. Wood, T. Wydeven, and O. Tsuji, in Ref. 5, p. 167
7. S. R. Lee and B. Gallois, Diamond Relat. Mater. 1. 235 (1992).
8. J. Beckman, R. B. Jackman, and J. S. Foord, Diamond Relat. Mater. 3, 602 (1994).
9. L. Bardos, T. Nyberg, H. Barankova, and S. Berg, Diamond Relat. Mater. 3, 528 (1994).
10. S. Matsumoto and K. K. Chattopadhyay, Proc. ISPC 12, 2315 (1995); K. K. Chattopadhyay and S. Matsumoto, Appl. Phys. Lett. 67, 3972 (1995).
11. S. Matsumoto and K. K. Chattopadhyay, Proc. ISPC 12, 2315 (1995); K. K. Chattopadhyay and S. Matsumoto, Appl. Phys. Lett. 67, 3972 (1995).
12. Y. Asakura, K. K. Chattopadhyay, S. Matsumoto, and K. Hirakuri, Proceedings of the 13th Symposium on Plasma Processing, Tokyo Jan. 29-31, 1996, Plasma Electronics Div. Jpn. Soc. Appl. Phys., p. 239.
13. Y. Asakura, S. Matsumoto, and K. Hirakuri (submitted).
14. S. Oda, Plasma Sources Sci. Technol. 2, 26 (1993).
15. A. Sawabe, H. Yasuda, T. Inuzuka, and K. Suzuki, Appl. Surf. Sci. 33/34, 539 (1989).