A theory on planar magnetron discharge

Thin Solid Films

Volumn 281-282, Issue 1-2, 1996, Pages 190-193

  Miura, Tsutomu ^a   Asamaki, Tatsuo ^a  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

Glow discharge; Planarization; Plasma processing and deposition; Sputtering

Indexed keywords

DEPOSITION; ELECTRIC FIELDS; ELECTRONS; IONIZATION; MAGNETIC FIELD EFFECTS; MAGNETRON SPUTTERING; THIN FILMS;

COLLISION FREQUENCY; DISCHARGE CURRENT; IONIZATION PROBABILITY; MAGNETIC FLUX DENSITY MEASUREMENT; PLANAR MAGNETRON DISCHARGE; POISSON'S EQUATIONS;

GLOW DISCHARGES;

EID: 0030217672     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(96)08610-5     Document Type: Article

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