Argon temperature and density versus the input power in a high pressure planar magnetron discharge

Vacuum

Volumn 64, Issue 3-4, 2002, Pages 367-371

  Escrivao M L ^a   Pereira, P J S ^b   Ferreira, J L ^a   Teixeira, M R ^a   Maneira, M J P ^a  

^a UNIVERSIDADE NOVA DE LISBOA   (Portugal)

^b Instituto Superior De Engenharia   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CATHODES; DENSITY (SPECIFIC GRAVITY); DIFFUSION; GLOW DISCHARGES; MATHEMATICAL MODELS; THERMAL EFFECTS;

MAGNETRON DISCHARGES;

MAGNETRON SPUTTERING;

EID: 0036134723     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00295-0     Document Type: Article

References (8)