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Volumn 10, Issue 3, 2003, Pages 882-890

Self-consistent discharge characteristics of collisional helicon plasmas

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; HELICONS; MAGNETIC FIELD EFFECTS; MATHEMATICAL MODELS; MAXWELL EQUATIONS;

EID: 0037350284     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1542613     Document Type: Article
Times cited : (33)

References (18)
  • 16
    • 0037945848 scopus 로고    scopus 로고
    • Local and global particle and power balance in large area capacitive discharges
    • submitted
    • S. Cho and M. A. Lieberman, "Local and global particle and power balance in large area capacitive discharges," Plasma Sources Sci. Technol. (submitted).
    • Plasma Sources Sci. Technol.
    • Cho, S.1    Lieberman, M.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.