메뉴 건너뛰기




Volumn 6, Issue 1, 1999, Pages 359-364

A self-consistent global model of neutral gas depletion in pulsed helicon plasmas

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0000475054     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.873289     Document Type: Article
Times cited : (24)

References (16)
  • 7
    • 0003638740 scopus 로고
    • in edited by O. A. Popov Noyes, Park Ridge, NJ
    • F. F. Chen, in High Density Plasma Sources, edited by O. A. Popov (Noyes, Park Ridge, NJ, 1994).
    • (1994) High Density Plasma Sources
    • Chen, F.F.1
  • 12
    • 0004292174 scopus 로고
    • in edited by D. M. Manos and D. L. Flamm Academic, San Diego
    • S. A. Cohen, in Plasma Etching, edited by D. M. Manos and D. L. Flamm (Academic, San Diego, 1989).
    • (1989) Plasma Etching
    • Cohen, S.A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.